Characterisation of aluminium oxynitride gas barrier films
- Author
- ERLAT, A. G1 ; HENRY, B. M1 ; INGRAM, J. J1 ; MOUNTAIN, D. B1 ; MCGUIGAN, A1 ; HOWSON, R. P2 ; GROVENOR, C. R. M1 ; BRIGGS, G. A. D1 ; TSUKAHARA, Y3
[1] Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom
[2] Department of Physics, Loughborough University, Loughborough, Leicestershire LE11 3TU, United Kingdom
[3] Technical Research Institute, Toppan Printing Co. Ltd., Sugito-machi, Kitakatsushika-gun, Saitama 345, Japan - Source
Thin solid films. 2001, Vol 388, Num 1-2, pp 78-86 ; ref : 37 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Aluminium Oxynitrure Caractérisation Couche mince Croissance cristalline en phase vapeur Ethylène téréphtalate polymère Etude expérimentale Magnétron Morphologie Perméation gazeuse Polymère Propriété mécanique Pulvérisation réactive Revêtement protecteur Traitement surface Al N O AlOxNy Substrat plastique Composé minéral Nitrure Oxyde
- Keyword (en)
- Aluminium Oxynitrides Characterization Thin films Crystal growth from vapors Ethylene terephthalate polymer Experimental study Magnetrons Morphology Gaseous permeation Polymers Mechanical properties Reactive sputtering Protective coatings Surface treatments Inorganic compounds Nitrides Oxides
- Keyword (es)
- Caracterización Etileno tereftalato polímero Permeación gaseosa
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1027548
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0040-6090(01)00836-7 
https://dx.doi.org/10.1016/S0040-6090(01)00836-7
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