PREVAIL e-beam stepper alpha tool
- Author
- PFEIFFER, H. C1 ; DHALIWAL, R. S1 ; ROCKROHR, J. D1 ; STICKEL, W1 ; TRESSLER, E. V1 ; TANIMOTO, A2 ; YAMAGUCHI, T2 ; OKAMOTO, K2 ; SUZUKI, K2 ; MIURA, T2 ; OKINO, T2 ; KAWATA, S2 ; GOLLADAY, S. D1 ; MORITA, K2 ; SUZUKI, S. C2 ; SHIMIZU, H2 ; KOJIMA, S2 ; VARNELL, G2 ; NOVAK, W. T3 ; SOGARD, M3 ; DORAN, S. K1 ; GORDON, M. S1 ; KENDALL, R. A1 ; LIEBERMAN, J. E1 ; PINCKNEY, D. J1 ; QUICKLE, R. J1 ; ROBINSON, C. F1
[1] IBM Microelectronics, Semiconductor Research and Development Center, East Fishkill, ZIP AP1, 1580 Route 52, Hopewell Junction, NY 12533, United States
[2] Nikon Corporation, Ohi Plant, 6-3 Nishi-Ohi 1-Chome, Shinagawa-Ku, Tokyo 140, Japan
[3] Nikon Research Corporation of America, 1399 Shoreway Road, Belmont, CA 94002, United States - Conference title
- Micro- and Nano-Engineering 2000 MNE. Proceedings of the 26th International Conference on Micro- and Nano-Engineering, September 18-21, 2000
- Conference name
- MNE 2000 Micro- and Nano-Engineering. International Conference (26 ; Jena 2000-09-18)
- Author (monograph)
- FORTAGNE, Olaf (Editor); KERN, Dieter P (Editor); BEHRINGER, Uwe (Editor)
- Source
Microelectronic engineering. 2001, Vol 57-58, pp 163-172 ; ref : 7 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Appareillage Implémentation Optique électronique 4185
- Keyword (en)
- Instrumentation Implementation Electron optics
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40A Electromagnetism; electron and ion optics / 001B40A85 Beam optics
- Discipline
- Physics : electromagnetism
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1131791
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0167-9317(01)00508-1 
https://dx.doi.org/10.1016/S0167-9317(01)00508-1
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arXiv access
