Design and operation of an Omegatron mass spectrometer for measurements of positive and negative ion species in electron cyclotron resonance plasmas
- Author
- KOO, B.-W1 ; HERSHKOWITZ, N1 ; SHILUO YAN1 ; KIM, G.-H2
[1] Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison, Madison, WI 53706-1687, United States
[2] Hanyang University, Department of Physics, Kyungki-Do, Ansan City 425∼791, Korea, Republic of - Source
Plasma sources science & technology (Print). 2000, Vol 9, Num 2, pp 97-107 ; ref : 19 ref
- ISSN
- 0963-0252
- Scientific domain
- Plasma physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Electroaimant Etude expérimentale Fréquence résonance Gravure plasma Ion négatif Ion positif Mégatron Radiofréquence Résonance cyclotronique électronique Spectromètre masse Système excitation
- Keyword (en)
- Electromagnets Experimental study Resonance frequency Plasma etching Negative ions Positive ions Megatron Radiofrequency Electron cyclotron-resonance Mass spectrometers Excitation systems
- Keyword (es)
- Frecuencia resonancia Grabado plasma Radiofrecuencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G75 Mass spectrometers and related techniques
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B35 Waves, oscillations, and instabilities in plasmas and intense beams / 001B50B35Q Plasma microinstabilities (ion-acoustic, two-stream, loss-cone, beam-plasma, drift, ion- or electron-cyclotron, etc.)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B50 Plasma production and heating / 001B50B50G Plasma heating (beam injection, radio-frequency and microwave, ohmic, icr, ecr and current drive heating)
- Pacs
- 5235Q Plasma microinstabilities (ion-acoustic, two-stream, loss-cone, beam-plasma, drift, ion- or electron-cyclotron, etc.)
- Pacs
- 5250G Plasma heating (beam injection, radio-frequency and microwave, ohmic, ICR, ECR, and current drive heating)
- Discipline
- Metrology Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1345455
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0963-0252/9/2/302 
https://dx.doi.org/10.1088/0963-0252/9/2/302
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