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Detection of hydrogen by electron Rutherford backscattering

Author
VOS, Maarten1
[1] Atomic and Molecular Physics Laboratories, Research School of Physical Sciences and Engineering, The Australian National University, Canberra, ACT 0200, Australia
Source

Ultramicroscopy. 2002, Vol 92, Num 3-4, pp 143-149, 7 p ; ref : 10 ref

CODEN
ULTRD6
ISSN
0304-3991
Scientific domain
Cell biology, histology; Crystallography; Physics
Publisher
Elsevier Science, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Keyword (fr)
Analyse chimique Couche mince Etude expérimentale Hydrogène Méthode analyse Profil dopage Profil profondeur Rétrodiffusion Rutherford
Keyword (en)
Chemical analysis Thin films Experimental study Hydrogen Analysis method Doping profiles Depth profiles Rutherford backscattering
Keyword (es)
Método análisis Retrodifusión Rutherford
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G78 Electron, positron and ion microscopes, electron diffractometers and related techniques

Pascal
001 Exact sciences and technology / 001B Physics / 001B20 Nuclear physics / 001B20E Nuclear reactions: specific reactions / 001B20E30 Lepton-induced reactions / 001B20E30B Elastic electron scattering

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A70 Materials testing

Pascal
001 Exact sciences and technology / 001C Chemistry / 001C04 Analytical chemistry / 001C04G Miscellaneous

Pacs
0778 Electron, positron, and ion microscopes, electron diffractometers, and related techniques

Pacs
2530B Elastic electron scattering

Pacs
8170J Chemical composition analysis, chemical depth and dopant profiling

Pacs
8280Y Rutherford backscattering (RBS), and other methods of chemical analysis

Discipline
Analytical chemistry Metrology Nuclear physics Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
13814369

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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