Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS process
- Author
- DAI, Ching-Liang1 ; KAIHSIANG YEN2 ; CHANG, Pei-Zen2
[1] Department of Mechanical Engineering, Oriental Institute of Technology, 220, Taipei, Taiwan, Province of China
[2] Institute of Applied Mechanics, National Taiwan University, 107, Taipei, Taiwan, Province of China - Source
Journal of micromechanics and microengineering (Print). 2001, Vol 11, Num 6, pp 697-702 ; ref : 12 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Basse tension Commutateur Connexion électrique Dispositif hyperfréquence Dispositif microélectromécanique Domaine fréquence GHz Etude expérimentale Guide onde Machine électrostatique Matériau stratifié Microusinage Polycristal Semiconducteur type p Silicium Structure MSM Substrat Technologie MOS complémentaire Transducteur capacitif
- Keyword (en)
- Low voltage Selector switch Electrical connection Microwave device Microelectromechanical device GHz range Experimental study Waveguide Electrostatic machine Stratified material Micromachining Polycrystal p type semiconductor Silicon MSM structure Substrate Complementary MOS technology Capacitive transducer
- Keyword (es)
- Baja tensión Conmutador Conexión eléctrica Dispositivo hiperfrecuencia Dispositivo microelectromecánico Estudio experimental Guía onda Máquina electrostática Material estratificado Micromaquinado Policristal Semiconductor tipo p Silicio Estructura MSM Substrato Tecnología MOS complementario Transductor capacitivo
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14076440
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/11/6/311 
https://dx.doi.org/10.1088/0960-1317/11/6/311
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