Microfluidic etching driven by capillary forces for rapid prototyping of gold structures
- Author
- STARK, R. W1 ; STALDER, M. Sakai1 ; STEMMER, A1
[1] Nanotechnology Group, Swiss Federal Institute of Technology Zurich, ETH Center CLA, 8092 Zurich, Switzerland - Conference title
- Proceedings of the 28th International Conference on Micro- and Nano-Engineering, September 16-19, 2002, Lugano, Switzerland
- Conference name
- MNE 2002 International Conference on Micro- and Nano-Engineering (28 ; Lugano 2002-09-16)
- Author (monograph)
- BRUGGER, J (Editor); GOBRECHT, J (Editor); ROTHUIZEN, H (Editor); STAUFER, U (Editor); VETTIGER, P (Editor)
- Source
Microelectronic engineering. 2003, Vol 67-68, pp 229-236, 8 p ; ref : 19 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Microfluidic etching Rapid prototyping Soft lithography
- Keyword (fr)
- Chimie surface Couche autoassemblée Couche épaisse Fabrication microélectronique Formation motif Gravure Lithographie Masquage Microfluidique Prototypage rapide
- Keyword (en)
- Surface chemistry Self-assembled layer Thick film Microelectronic fabrication Patterning Engraving Lithography Masking Microfluidics Rapid prototyping
- Keyword (es)
- Capa autoensamblada Capa espesa Fabricación microeléctrica Formacíon motivo Grabado Litografía Enmascaramiento Prototipificación rápida
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 14862654
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0167-9317(03)00076-5 
https://dx.doi.org/10.1016/S0167-9317(03)00076-5
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