Mechanism and energetics of dimerization of SiH2 radicals on H-terminated Si(001)-(2 x 1) surfaces
- Author
- SRIRAMAN, Saravanapriyan1 ; MAHALINGAM, Pushpa2 ; AYDIL, Eray S1 ; MAROUDAS, Dimitrios3
[1] Department of Chemical Engineering, Engineering II Bldg., University of California, Santa Barbara, CA 93106-5080, United States
[2] Texas Instruments, 13121 TI Blvd, MS352, Dallas, TX 75243, United States
[3] Department of Chemical Engineering, University of Massachusetts, Amherst, MA 01003-3110, United States - Source
Surface science. 2003, Vol 540, Num 2-3, pp L623-L630 ; ref : 36 ref
- Publisher
- Elsevier Science, Amsterdam
/
Elsevier Science, Lausanne
/
Elsevier Science, New York, NY
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Hydrogen atom Molecular dynamics Plasma processing Semiconductor-semiconductor thin film structures Silicon Surface chemical reaction
- Keyword (fr)
- Adsorbant minéral Adsorbat minéral Adsorption gaz solide Changement conformation Dimérisation Dynamique surface Energie surface Etude théorique Face cristalline Interface gaz solide Méthode dynamique moléculaire Méthode fonctionnelle densité Orientation moléculaire Réaction surface Silicium Silylène minéral Structure adsorption
- Keyword (en)
- Inorganic adsorbent Inorganic adsorbate Gas solid adsorption Conformational changes Dimerization Surface dynamics Surface energy Theoretical study Crystal faces Gas solid interface Molecular dynamics method Density functional method Molecular orientation Surface reactions Silicon Inorganic silylene Adsorption structure
- Keyword (es)
- Adsorbente inorgánico Adsorbato inorgánico Adsorción gas sólido Interfase gas sólido Silileno inorgánico Estructura adsorción
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H45 Solid-fluid interfaces / 001B60H45D Adsorption and desorption kinetics; evaporation and condensation
- Pascal
- 001 Exact sciences and technology / 001C Chemistry / 001C01 General and physical chemistry / 001C01I Surface physical chemistry / 001C01I04 Solid-gas interface
- Discipline
- General chemistry and physical chemistry Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 15044045
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0039-6028(03)00869-0 
https://dx.doi.org/10.1016/S0039-6028(03)00869-0
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