Comparative TEM study of bonded silicon/silicon interfaces fabricated by hydrophilic, hydrophobic and UHV wafer bonding
- Author
- REZNICEK, A1 ; SCHOLZ, R1 ; SENZ, S1 ; GÖSELE, U1
[1] Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany - Conference title
- EMC 2002: XIth International Conference on Electron Microscopy of Solids, May 19-23, 2002 in Krynica, Poland
- Conference name
- EMC 2002 International Conference on Electron Microscopy of Solids (11 ; Krynica 2002-05-19)
- Author (monograph)
- BIELANSKA, Elzbieta (Editor)1 ; DUTKIEWICZ, Jan (Editor)1 ; ZIEBA, Pawel (Editor)1
Polish Materials Society ; State Committee for Scientific Research, Poland (Funder/Sponsor)
Polish Academy of Sciences ; Committee on Materials Science ; Microscopy Section, Poland (Funder/Sponsor)
[1] Polish Academy of Sciences, Institute of Metallurgy and Materials Science, Cracow, Poland - Source
Materials chemistry and physics. 2003, Vol 81, Num 2-3, pp 277-280, 4 p ; ref : 6 ref
- CODEN
- MCHPDR
- ISSN
- 0254-0584
- Scientific domain
- Chemistry; Metallurgy, welding; Physics
- Publisher
- Elsevier, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Etude comparative Fixation pastille Interface Microscopie électronique transmission Microscopie électronique Silicium
- Keyword (en)
- Comparative study Wafer bonding Interfaces Transmission electron microscopy Electron microscopy Silicon
- Keyword (es)
- Estudio comparativo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A16 Electron, ion, and scanning probe microscopy
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 15085340
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0254-0584(02)00601-6 
https://dx.doi.org/10.1016/S0254-0584(02)00601-6
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