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The interface between silicon and a high-k oxide

Author
FÖRST, Clemens J1 2 ; ASHMAN, Christopher R1 ; SCHWARZ, Karlheinz2 ; BLÖCHI, Peter E1
[1] Clausthal University of Technology, Institute for Theoretical Physics, Leibnitzstrasse 10, 38678 Clausthal-Zellerfeld, Germany
[2] Vienna University of Technology Institute for Materials Chemistry Getreidemarkt 9/165-TC, 1060 Vienna, Austria
Source

Nature (London). 2004, Vol 427, Num 6969, pp 53-56, 4 p ; ref : 28 ref

CODEN
NATUAS
ISSN
0028-0836
Scientific domain
Multidisciplinary
Publisher
Nature Publishing, London
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Constante diélectrique Etat électronique interface Etude expérimentale Méthode fonctionnelle densité Oxydation Passivation Silicium oxyde Silicium Strontium titanate Structure atomique Structure interface
Keyword (en)
Permittivity Interface electron state Experimental study Density functional method Oxidation Passivation Silicon oxides Silicon Strontium titanates Atomic structure Interface structure
Keyword (es)
Estado electrónico interfase
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35C Interface structure and roughness

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C21 Electron states and collective excitations in thin films, multilayers, quantum wells, mesoscopic and nanoscale systems / 001B70C21A Thin films and multilayers

Pacs
6835C Interface structure and roughness

Pacs
7321A Multilayers

Discipline
Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
15707989

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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