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The effect of germanium doping on oxygen donors in Czochralski-grown silicon

Author
HONG LI1 ; DEREN YANG1 ; XUEGONG YU1 ; XIANGYANG MA1 ; DAXI TIAN1 ; LIBEN LI1 ; DUANLIN QUE1
[1] State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, China
Source

Journal of physics. Condensed matter (Print). 2004, Vol 16, Num 32, pp 5745-5750, 6 p ; ref : 20 ref

CODEN
JCOMEL
ISSN
0953-8984
Scientific domain
Crystallography; Metallurgy, welding; Condensed state physics
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Addition germanium Addition oxygène Centre donneur Dopage Défaut ponctuel Etat défaut Impureté Non stoechiométrie Précipitation Recuit thermique Silicium Ge Si
Keyword (en)
Germanium additions Oxygen additions Donor center Doping Point defects Defect states Impurities Nonstoichiometry Precipitation Thermal annealing Silicon
Keyword (es)
Centro dador Doping Recocido térmico
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70A Electron states / 001B70A55 Impurity and defect levels / 001B70A55C Elemental semiconductors

Pacs
7155C Elemental semiconductors

Discipline
Physics of condensed state : electronic structure, electrical, magnetic and optical properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16002475

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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