Structural optimization of a large-displacement electromagnetic Lorentz force microactuator for optical switching applications
- Author
- JEONG SAM HAN1 ; JONG SOO KO2 ; KORVINK, Jan G1
[1] IMTEK-Institute for Microsystem Technology, University of Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
[2] Department of Mechanical Engineering, Pusan National University, 30 Jangjeon-dong, Geumjeong-gu, Busan 609-735, Korea, Republic of - Source
Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 11, pp 1585-1596, 12 p ; ref : 28 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur Analyse structurale Commutation optique Dispositif microélectromécanique Dispositif électromagnétique Electromagnétisme Flambage Force Lorentz Force électromagnétique Fréquence propre Grand déplacement Microactionneur Optimisation Ressort lame Silicium 0710C 8540H
- Keyword (en)
- Actuator Structural analysis Optical switching Microelectromechanical device Electromagnetic device Electromagnetism Buckling Lorentz force Electromagnetic force Natural frequency Large displacement Microactuators Optimization Leaf spring Silicon
- Keyword (es)
- Accionador Análisis estructural Conmutación óptica Dispositivo microelectromecánico Dispositivo electromagnético Electromagnetismo Pandeo Fuerza Lorentz Fuerza electromagnética Frecuencia propia Gran desplazamiento Optimización Resorte lámina Silicio
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16260176
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/14/11/021 
https://dx.doi.org/10.1088/0960-1317/14/11/021
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