Study on micro-mirror macro model and its dynamic behavior
- Author
- JINGMING SONG1 ; YU RUAN1 ; JINHUI ZHAI1
[1] Optoelectronics Department, Huazhong University of Science and Technology, Wuhan, 430074, China - Source
Optik (Stuttgart). 2004, Vol 115, Num 12, pp 569-573, 5 p ; ref : 6 ref
- Publisher
- Elsevier, Jena
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur électrostatique Basculement Dispositif microélectromécanique Etude théorique Microactionneur Micromanipulateur Micromiroir Modélisation Propriété dynamique Surface réfléchissante
- Keyword (en)
- Electrostatic actuators Tilting Microelectromechanical device Theoretical study Microactuators Micromanipulators Micromirrors Modeling Dynamic properties Reflecting surface
- Keyword (es)
- Balanceo Dispositivo microelectromecánico Estudio teórico Modelización Propiedad dinámica Superficie reflexiva
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16384507
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1078/0030-4026-00569 
https://dx.doi.org/10.1078/0030-4026-00569
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