Defects and electrical consequences in SOI buried oxides
- Author
- HOVEL, H. J1 ; ALMONTE, M2 ; LEE, J. D2 ; SADANA, D1 ; DOMENICUCCI, A2 ; BETTINGER, J2
[1] IBM Corporation, P.O. BOX 218, Yorktown Hts., NY 10598, United States
[2] Route 52, Hopewell Junction, NY 12533, United States - Conference title
- Silicon-on-insulator technology and devices XI (Paris, 28 April - 2 May 2003)
- Conference name
- Silicon-on-insulator technology and devices (11 ; Paris 2003-04-28)
- Author (monograph)
- Celler, G (Editor); Fossum, J (Editor); Gamiz, F (Editor); Izumi, K (Editor); Kim, Y.W (Editor)
Electrochemical Society, Electronics Division, Pennington NJ, United States (Organiser of meeting) - Source
Proceedings - Electrochemical Society. 2003, pp 105-110, 6 p ; ref : 12 ref
- ISSN
- 0161-6374
- ISBN
- 1-56677-375-X
- Scientific domain
- General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
- Publisher
- Electrochemical Society, Pennington NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Caractéristique électrique Circuit intégré Courant fuite Endommagement Fabrication microélectronique Gravure ionique réactive Piqûre corrosion Technologie SIMOX Technologie silicium sur isolant
- Keyword (en)
- Electrical characteristic Integrated circuit Leakage current Damaging Microelectronic fabrication Reactive ion etching Pinhole SIMOX technology Silicon on insulator technology
- Keyword (es)
- Característica eléctrica Circuito integrado Corriente escape Deterioración Fabricación microeléctrica Grabado iónico reactivo Picadura corrosión Tecnología SIMOX Tecnología silicio sobre aislante
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16545699
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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