Electrical characterization of thin gate oxynitride obtained by N+ implantation into polysilicon/thermal oxide/silicon structure
- Author
- TOQUETTI, Leandro Z1 ; DOS SANTOS, Sebastiao G1 ; DINIZ, José A2 ; SWART, Jacobus W2 3
[1] University of São Paulo, LSI/PSI/EPUSP, Av. Prof. Luciano Gualberto, 158, trav.3, São Paulo, SP, CEP 05508-900, Brazil
[2] CCS, State University of Campinas, C.P 6061, CEP13083-970, Campinas, SP, Brazil
[3] FEEC, State University of Campinas, CEP13083-970, Campinas, SP, Brazil - Conference title
- Microelectronics technology and devices SBMICRO 2004 (Porto de Galinhas Beach, 2004)
- Conference name
- International symposium on microelectronics technology and devices (19 ; 2004)
- Author (monograph)
- Santos, E.J.P (Editor); Ribas, R.P (Editor); Swart, J (Editor)
Electrochemical Society, Electronics Division, Pennington NJ, United States (Organiser of meeting) - Source
Proceedings - Electrochemical Society. 2004, pp 331-336, 6 p ; ref : 10 ref
- ISSN
- 0161-6374
- ISBN
- 1-56677-416-0
- Scientific domain
- General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
- Publisher
- Electrochemical Society, Pennington NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Capacité électrique Caractéristique électrique Densité charge Disruption électrique Défaillance Etat interface Fabrication microélectronique Implantation ion Microscopie électronique transmission Polycristal Tension amorçage
- Keyword (en)
- Capacitance Electrical characteristic Charge density Electric breakdown Failures Interface state Microelectronic fabrication Ion implantation Transmission electron microscopy Polycrystal Breakdown voltage
- Keyword (es)
- Capacitancia Característica eléctrica Densidad carga Disrupción eléctrica Fallo Estado interfase Fabricación microeléctrica Implantación ión Microscopía electrónica transmisión Policristal Voltaje perforación
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16546114
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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