Charge trapping in high-dose Ge-implanted and Si-implanted silicon-dioxide thin films
- Author
- NAZAROV, A. N1 ; OSIYUK, I. N1 ; TYAGULSKII, I. P1 ; LYSENKO, V. S1 ; GEBEL, T2 ; SKORUPA, And W3
[1] Institute of Semiconductor Physics, NASU, Prospekt Nauki 45, Kyiv, 03028, Ukraine
[2] Nanoparc GmbH, 01328 Dresden, Germany
[3] Institute of Ion Beam Physics and Material Research, Forschungszentrum Rossendorf, 01314 Dresden, Germany - Conference title
- Silicon nitride and silicon dioxide thin insulating films VII (Paris, 28 April - 2 May 2003)
- Conference name
- Symposium on silicon nitride and silicon dioxide thin insulating films (Paris 2003-04-28)
- Author (monograph)
- Sah, R.E (Editor); Deen, M.J (Editor); Landheer, D (Editor); Sundaram, K.B (Editor); Brown, W.D (Editor); Misra, D (Editor)
Electrochemical Society, Dielectric Science and Technology, Electronics Division, Pennington NJ, United States (Organiser of meeting) - Source
Proceedings - Electrochemical Society. 2003, pp 144-149, 6 p ; ref : 7 ref
- ISSN
- 0161-6374
- ISBN
- 1-56677-347-4
- Scientific domain
- General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Condensed state physics; Physics
- Publisher
- Electrochemical Society, Pennington NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Contact isolant semiconducteur Couche mince Electron Injection porteur charge Injection électron Piège trou Piège électron Piégeage porteur charge Recuit thermique rapide
- Keyword (en)
- Semiconductor insulator contact Thin film Electrons Charge carrier injection Electron injection Hole traps Electron traps Charge carrier trapping Rapid thermal annealing
- Keyword (es)
- Contacto aislante semiconductor Capa fina Electrón Inyección portador carga Inyección electrón Captura portador carga Recocido térmico rápido
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03C Materials
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F01 Interfaces
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16546138
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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