Compatibility of polysilicon with HFO2-BASED gate dielectrics for CMOS applications
- Author
- KAUSHIK, V. S1 ; DEGENDT, S1 ; CARTER, R1 ; CANARD, T1 ; VANDERVORST, W1 ; SCHAEKERS, M1 ; HEYNS, M1 ; CAYMAX, M1 ; YOUNG, E2 ; ROHR, E1 ; ELSHOCHT, S. V1 ; DELABIE, A1 ; CLAES, M1 ; SHI, X1 ; CHEN, J2
[1] Inter-university MicroElectronic Center (IMEC), Kapeldreef 75, 3001 Leuven, Belgium
[2] International Sematech, 2706 Montopolis Drive, Austin Texas 78741, United States - Conference title
- ULSI process integration III (Paris, 28 April - 2 May 2003)
- Conference name
- Symposium on ULSI process integration (3 ; Paris 2003-04-28)
- Author (monograph)
- Claeys, C.L (Editor); Gonzales, F (Editor); Murota, J (Editor); Fazan, P (Editor); Singh, R (Editor)
Electrochemical Society, Electronics Division, Pennington NJ, United States (Organiser of meeting) - Source
Proceedings - Electrochemical Society. 2003, pp 391-396, 6 p ; ref : 8 ref
- ISSN
- 0161-6374
- ISBN
- 1-56677-376-8
- Scientific domain
- General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
- Publisher
- Electrochemical Society, Pennington NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Condensateur Couche mince diélectrique Courant fuite Courant grille Matériau amorphe Polycristal Recuit Revêtement Technologie MOS complémentaire
- Keyword (en)
- Capacitor Dielectric thin films Leakage current Gate current Amorphous material Polycrystal Annealing Coatings Complementary MOS technology
- Keyword (es)
- Condensador Corriente escape Corriente rejilla Material amorfo Policristal Recocido Revestimiento Tecnología MOS complementario
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F09 Dielectric, amorphous and glass solid devices
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16546986
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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