Designing the micro opto mechanical vibration sensor
- Author
- BORECKI, Michal1 ; KRUSZEWSKI, Jerzy1
[1] Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, 75 Koszykowa Str., 00-662 Warszawa, Poland - Conference title
- Lightguides and their applications II (Krasnobrod, 9-11 October 2003)
- Conference name
- Lightguides and their applications. Conference (2 ; Krasnobrod 2003-10-09)
- Author (monograph)
- Wojcik, Jan (Editor); Wojcik, Waldemar (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting) - Source
SPIE proceedings series. 2004, pp 149-153, 5 p ; ref : 5 ref
- ISBN
- 0-8194-5525-3
- Scientific domain
- Electronics; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Capteur mesure Capteur vibration Champ libre Dispositif microoptoélectromécanique Fabrication microélectronique Fibre optique Optique intégrée Transformateur Vibration mécanique Vibromètre
- Keyword (en)
- Measurement sensor Vibration transducer Free field Microoptoelectromechanical device Microelectronic fabrication Optical fibers Integrated optics Transformers Mechanical vibrations Vibrometer
- Keyword (es)
- Captador medida Transductor vibración Campo libre Dispositivo microoptoelectromecánico Fabricación microeléctrica Vibrómetro
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16564287
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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