Nanoprocessing and nanofabrication of a structured polymer film by the focused-ion-beam technique
- Author
- NIIHARA, Ken-Ichi1 2 ; KANEKO, Takeshi; SUZUKI, Toshiaki; SATO, Yasuhiko; NISHIOKA, Hideo; NISHIKAWA, Yukihiro; NISHI, Toshio3 ; JINNAI, Hiroshi
[1] Department of Polymer Science and Engineering, Kyoto Institute of Technology, Matsugasaki, Kyoto 606-8585, Japan
[2] JEOL Co. Ltd. 1-2 Musashino 3-chome, Akishima Tokyo 196-8558, Japan
[3] Department of Organic and Polymeric Materials, School of Science and Engineering, Tokyo Institute of Technology, 2-12-1, Ohokayama, Meguro-ku, Tokyo 152-8552, Japan - Source
Macromolecules. 2005, Vol 38, Num 8, pp 3048-3050, 3 p
- CODEN
- MAMOBX
- ISSN
- 0024-9297
- Scientific domain
- Polymers, paint and wood industries
- Publisher
- American Chemical Society, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Copolymère biséquencé Couche ultramince Etude expérimentale Film Formation motif Isoprène copolymère Lithographie faisceau ion Nanolithographie Nanostructure Polymère monodispersé Styrène copolymère Technologie faisceau ion focalisé
- Keyword (en)
- Diblock copolymer Ultrathin films Experimental study Film Patterning Isoprene copolymer Ion beam lithography Nanolithography Nanostructure Monodispersed polymer Styrene copolymer Focused ion beam technology
- Keyword (es)
- Copolímero bisecuencia Estudio experimental Película Formacíon motivo Isopreno copolímero Litografía haz iónico Nanoestructura Polímero monodispersado Estireno copolímero
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D10 Polymer industry, paints, wood / 001D10A Technology of polymers / 001D10A04 Machinery and processing / 001D10A04A Plastics / 001D10A04A8 Miscellaneous
- Discipline
- Polymer industry, paints, wood
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16699005
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1021/ma048380m 
https://dx.doi.org/10.1021/ma048380m
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