Structure and properties of zirconium oxide thin films prepared by filtered cathodic vacuum arc
- Author
- YU, G. Q1 ; TAY, B. K1 ; ZHAO, Z. W1
[1] School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798, Singapore - Source
Applied physics. A, Materials science & processing (Print). 2005, Vol 81, Num 2, pp 405-411, 7 p ; ref : 57 ref
- ISSN
- 0947-8396
- Scientific domain
- Electronics; Optics; Condensed state physics
- Publisher
- Springer, Berlin
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Keyword (fr)
- Constante optique Couche mince Densité optique Dépôt physique phase vapeur Etat amorphe Microstructure Morphologie surface Orientation préférentielle Polycristal Propriété mécanique Propriété optique Spectre absorption Structure état amorphe Valence Vitesse dépôt Zirconium oxyde 7866J 78 Arc cathodique filtré O Zr ZrO2
- Keyword (en)
- Optical constants Thin films Optical density Physical vapor deposition Amorphous state Microstructure Surface morphology Preferred orientation Polycrystals Mechanical properties Optical properties Absorption spectra Amorphous state structure Valence Deposition rate Zirconium oxides Filtered cathodic vacuum arc
- Keyword (es)
- Densidad óptica Orientación preferencial Estructura estado amorfo Velocidad deposición
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films / 001B70H66J Amorphous semiconductors; glasses
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16801962
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s00339-004-2602-5 
https://dx.doi.org/10.1007/s00339-004-2602-5
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