Ab-initio simulations on growth and interface properties of epitaxial oxides on silicon
- Author
- FÖRST, C. J1 2 ; ASHMAN, C. R1 ; SCHWARZ, K2 ; BLÖCHL, P. E1
[1] Clausthal University of Technology, Institute for Theoretical Physics, Leibnitzstr. 10, 38678 Clausthal-Zellerfeld, Germany
[2] Vienna University of Technology, Institute for Materials Chemistry, Getreidemarkt 9/165-TC, 1060 Vienna, Austria - Conference title
- Infos 2005: Proceedings of the 14th Biennal Conference on Insulating Films on Semiconductors, June 22-24, 2005, Leuven, Belgium
- Conference name
- INFOS 2005 Biennal Conference on Insulating Films on Semiconductors (14 ; Leuven 2005-06-22)
- Author (monograph)
- GROESENEKEN, Guido (Editor)1 ; KACZER, Ben (Editor)1
IMEC, Leuven, Belgium (Organiser of meeting)
[1] IMEC, Leuven, Belgium - Source
Microelectronic engineering. 2005, Vol 80, pp 402-407, 6 p ; ref : 19 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- ab-initio band-offset engineering epitaxial growth high-k oxides interface chemistry
- Keyword (fr)
- Calcul ab initio Croissance film Discontinuité bande Diélectrique permittivité élevée Epitaxie Mécanisme croissance Méthode dynamique moléculaire Propriété interface Strontium oxyde Strontium titanate Structure électronique O Sr Ti O Sr SrO SrTiO3
- Keyword (en)
- Ab initio calculations Film growth Band offset High k dielectric Epitaxy Growth mechanism Molecular dynamics method Interface properties Strontium oxide Strontium titanates Electronic structure
- Keyword (es)
- Discontinuidad banda Dieléctrico alta constante dieléctrica Epitaxia Mecanismo crecimiento Método dinámico molecular Propiedad interfase Estroncio óxido Estructura electrónica
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F01 Interfaces
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16891712
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2005.04.100 
https://dx.doi.org/10.1016/j.mee.2005.04.100
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