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Tool wear characteristics and their effects on nanoscale ductile mode cutting of silicon wafer

Author
LI, X. P1 ; HE, T1 ; RAHMAN, M1
[1] Department of Mechanical Engineering and Division of Bioengineering, The National University of Singapore, 9 Engineering Drive I, Singapore 117576, Singapore
Conference title
15th International Conference on Wear of Materials, San Diego, USA, 24-28 April 2005. Part 2
Conference name
International Conference on Wear of Materials (15 ; San Diego 2005-04-24)
Author (monograph)
BLAU, Peter J (Editor)1 ; SHAFFER, Steven J (Editor)2
[1] Metals and Ceramics Division, Oak Ridge National Laboratory, United States
[2] Battelle Memorial Institute, United States
Source

Wear. 2005, Vol 259, Num 7-12, pp 1207-1214, 8 p ; 2 ; ref : 20 ref

CODEN
WEARAH
ISSN
0043-1648
Scientific domain
Chemical engineering; Mechanical engineering; Mechanics acoustics; Metallurgy, welding
Publisher
Elsevier Science, Amsterdam / Elsevier Science, Lausanne / Elsevier Science, New York, NY
Publication country
Switzerland
Document type
Conference Paper
Language
English
Author keyword
Ductile mode cutting Nanoscale Silicon wafer Tool wear
Keyword (fr)
Contact mécanique Découpage Essai non destructif Force coupe Formation copeau Indentation Matériau ductile Matériau pour outils Monocristal Nanostructure Outil coupe Outil diamant Pastille électronique Rupture Silicium Tribologie Usinage Usure outil
Keyword (en)
Mechanical contact Cutting Non destructive test Cutting force Chip formation Indentation Ductile material Tool material Single crystal Nanostructure Cutting tool Diamond tool Wafer Rupture Silicon Tribology Machining Tool wear
Keyword (es)
Contacto mecánico Troquelado Ensayo no destructivo Fuerza corte Formación viruta Indentación Material dúctil Material para herramientas Monocristal Nanoestructura Herramienta corte Diamante Pastilla electrónica Ruptura Silicio Tribología Mecanizado Desgate instrumento
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40F Solid mechanics / 001B40F30 Structural and continuum mechanics / 001B40F30N Fracture mechanics (crack, fatigue, damage...)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12D Machine components / 001D12D02 Friction, wear, lubrication

Discipline
Mechanical engineering. Mechanical construction. Handling Physics : solid mechanics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16964865

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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