Properties of stacked dielectric films composed of SiO2/Si3N4/SiO2
- Author
- SANTUCCI, S1 ; LOZZI, L1 ; PASSACANTANDO, M1 ; PHANI, A. R1 ; PALUMBO, E1 ; BRACCHITTA, G2 ; DE TOMMASIS, R2 ; TORSI, A2 ; ALFONSETTI, R2 ; MOCCIA, G2
[1] Dipartimento di Fisica and Unità INFM, Università dell'Aquila, Via Vetoio 10 Coppito, 67010 L'Aquila, Italy
[2] Texas Instruments Italia, Via Pacinotti 10, Avezzano (AQ), Italy - Conference title
- Proceedings of the 2nd Franco-Italian Symposium on SiO2 and Advanced Dielectrics
- Conference name
- French-Italian Symposium on SiO2 and Advanced Dielectrics (2 ; L'Aquila 1998-06-15)
- Author (monograph)
- SPINOLO, G (Editor)1 ; VEDDA, A (Editor)1 ; AUTRAN, J.-L (Editor)2 ; DEVINE, R. A. B (Editor)3
[1] Dipartimento di Scienza dei Materiali, Università degli Studi di Milano, Milan, Italy
[2] Laboratoire de Physique de la Matière, Institut National des Sciences Appliquées (INSA), Villeurbanne, France
[3] France Telecom, CNET, Meylan, France - Source
Journal of non-crystalline solids. 1999, Vol 245, pp 224-231 ; ref : 18 ref
- CODEN
- JNCSBJ
- ISSN
- 0022-3093
- Scientific domain
- Crystallography; Chemical industry parachemical industry; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Composition chimique Composé binaire Courant fuite Dépôt chimique phase vapeur Etude expérimentale Hétérostructure Oxydation Rayon X Silicium nitrure Silicium oxyde Spectre RX Spectre réflexion Spectrométrie photoélectron N Si O Si Si3N4 SiO2 Composé minéral
- Keyword (en)
- Chemical composition Binary compounds Leakage currents CVD Experimental study Heterostructures Oxidation X radiation Silicon nitrides Silicon oxides X-ray spectra Reflection spectrum Photoelectron spectroscopy Inorganic compounds
- Keyword (es)
- Espectro reflexión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H65 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C40 Electronic transport in interface structures
- Pacs
- 6865 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1763993
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0022-3093(98)00886-2 
https://dx.doi.org/10.1016/S0022-3093(98)00886-2
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