Electron kinetics in cylindrical discharges of magnetron configurations
- Author
- GOLUBOVSKII, Yu. B1 ; POROKHOVA, I. A1 ; SUSHKOV, V. P1 ; HOLIK, M2 ; KUDRNA, P2 ; TICHY, M2
[1] St Petersburg State University, Ulianovskaia 1, 195904 St Petersburg, Russian Federation
[2] Charles University in Prague, V Holešovickách 2, 18000, Prague, Czech Republic - Source
Plasma sources science & technology (Print). 2006, Vol 15, Num 2, pp 228-236, 9 p ; ref : 21 ref
- ISSN
- 0963-0252
- Scientific domain
- Plasma physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- Russian
- Keyword (fr)
- Argon Cathode creuse Densité électron Décharge électrique Electron secondaire Equation Boltzmann Equation cinétique Etude expérimentale Etude théorique Fonction distribution Hydrodynamique Ionisation Magnétron Particule chargée 5225D Flux particule
- Keyword (en)
- Argon Hollow cathodes Electron density Electric discharges Secondary electron Boltzmann equation Kinetic equations Experimental study Theoretical study Distribution functions Hydrodynamics Ionization Magnetrons Charged particles
- Keyword (es)
- Electrón secundario
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B25 Plasma properties / 001B50B25D Plasma kinetic equations
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges / 001B50B80T Other gas discharges
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 17772906
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0963-0252/15/2/007 
https://dx.doi.org/10.1088/0963-0252/15/2/007
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