A simple technique for defining the structure and the dimensional parameters of layered specimens
- Author
- DREOMOVA, N1
[1] RD&P Center ORION/ State Scientific Center, Moscow, Russian Federation - Conference title
- Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics (25-27 May 2005, Moscow, Russia)
- Conference name
- All-Russian Seminar on Problems of Theoretical and Applied Electron and Ion Optics (7 ; Moscow 2005)
- Author (monograph)
- Filachev, Anatoly M (Editor); Gaidoukova, Inna S (Editor)
Russia, Federal Agency on Industry, Russian Federation (Organiser of meeting)
Rossiĭskaia akademiia nauk, Russian Federation (Organiser of meeting)
Society of Photo-optical Instrumentation Engineers, United States (Organiser of meeting)
Society of Photo-optical Instrumentation Engineers, Russian Chapter, Russian Federation (Organiser of meeting)
State Scientific Center of the Russian Federation RD&P Center ORION, Russian Federation (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2006 ; 1Vol, pp 62780P.1-62780P.4 ; ref : 4 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 0-8194-6348-5
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- Russian
- Keyword (fr)
- Microscopie électronique balayage Optique ionique Optique électronique Rayon X 4185
- Keyword (en)
- Scanning electron microscopy Ion optics Electron optics X radiation
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40A Electromagnetism; electron and ion optics / 001B40A85 Beam optics
- Discipline
- Physics : electromagnetism
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18360136
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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