Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection
- Author
- BURG, Thomas P1 ; MIRZA, Amir R2 ; MILOVIC, Nebojsa1 ; TSAU, Christine H1 ; POPESCU, George A3 ; FOSTER, John S2 ; MANALIS, Scott R1 4
[1] Division of Biological Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United States
[2] Innovative Micro Technology, Santa Barbara, CA 93117, United States
[3] Media Laboratory, Massachusetts Institute of Technology, Cambridge, MA 02139, United States
[4] Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United States - Source
Journal of microelectromechanical systems. 2006, Vol 15, Num 6, pp 1466-1476, 11 p ; ref : 33 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Biomedical transducers Q factor chemical transducers density measurement mass sensor microbalance vacuum packaging
- Keyword (fr)
- Amortissement visqueux Basse pression Biologie moléculaire Capteur mesure Dispositif microélectromécanique Encapsulation Etude expérimentale Fluidique Liquide Mesure densité Microfluidique Microusinage Protéine Silicium polycristallin Sous vide Traînée Tube Capteur masse
- Keyword (en)
- Viscous damping Low pressure Molecular biology Measurement sensor Microelectromechanical device Encapsulation Experimental study Fluidics Liquids Density measurement Microfluidics Micromachining Proteins Polysilicon Under vacuum Drag Tubes Mass sensor
- Keyword (es)
- Amortiguación viscosa Captador medida Dispositivo microelectromecánico Silicio policristal En vacío Sensor masa
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Metrology Physics : fluid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18364248
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2006.883568 
https://dx.doi.org/10.1109/JMEMS.2006.883568
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