Fabrication of 0.15-μm Γ-shaped gate In0.52Al0.48As /In0.6Ga0.4As metamorphic HEMTs using DUV lithography and tilt dry-etching technique
- Author
- LIEN, Yi-Chung1 ; CHEN, Szu-Hung1 ; YI CHANG, Edward1 ; LEE, Ching-Ting2 ; CHU, Li-Hsin1 ; CHANG, Chia-Yuan1
[1] Department of Materials Science and Engineering, National Chiao-Tung University, Hsinchu 30050, Taiwan, Province of China
[2] Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, Tainan 701, Taiwan, Province of China - Source
IEEE electron device letters. 2007, Vol 28, Num 2, pp 93-95, 3 p ; ref : 12 ref
- CODEN
- EDLEDZ
- ISSN
- 0741-3106
- Scientific domain
- Electronics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Deep ultraviolet (DUV) lithography metamorphic high-electron mobility transistors (MHEMTs) r-shaped gate tilt dry- etching technique
- Keyword (fr)
- Circuit MMIC Courant drain Diminution coût Fabrication microélectronique Gravure sèche Lithographie UV Lithographie faisceau électron Photolithographie Procédé voie sèche Rayonnement UV extrême Source courant Transconductance Transistor mobilité électron élevée Transistor métamorphique
- Keyword (en)
- MMIC Drain current Cost lowering Microelectronic fabrication Dry etching UV lithography Electron beam lithography Photolithography Dry process Vacuum ultraviolet radiation Current source Transconductance High electron mobility transistor Metamorphic transistor
- Keyword (es)
- Corriente dren Reducción costes Fabricación microeléctrica Grabado seco Litografía UV Litografía haz electrón Fotolitografía Procedimiento vía seca Radiación ultravioleta extrema Fuente corriente Transconductancia Transistor movibilidad elevada electrones Transistor metamórfico
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03D Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F04 Transistors
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02B Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18470368
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/LED.2006.889049 
https://dx.doi.org/10.1109/LED.2006.889049
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