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Secondary electron suppression in nitrogen plasma ion implantation using a low DC magnetic field

Author
UEDA, M1 ; TAN, I. H1 ; DALLAQUA, R. S1 ; ROSSI, J. O1
[1] Associated Laboratory of Plasma, National Institute for Space Research, S.J. Campos, S. Paulo, Brazil
Conference title
Proceedings of the VIIIth International Workshop on Plasma-Based Ion Implantation and Deposition, Chengdu, Sichuan, China, September 18-22, 2005
Conference name
International Workshop on Plasma-Based Ion Implantation and Deposition (BPII and D-05) (BPII and D-05) (8 ; Chengdu, Sichuan 2005-09-18)
Author (monograph)
HUANG, Nan (Editor)1 ; CHU, Paul K (Editor)1 ; LENG, Yongxiang (Editor)1
Southwest Jiaotong University®, China (Organiser of meeting)
[1] Southwest Jiaotong University, China
Source

Surface & coatings technology. 2007, Vol 201, Num 15, pp 6597-6600, 4 p ; ref : 7 ref

CODEN
SCTEEJ
ISSN
0257-8972
Scientific domain
General chemistry, physical chemistry; Metallurgy, welding
Publisher
Elsevier, Lausanne
Publication country
Switzerland
Document type
Conference Paper
Language
English
Author keyword
52.77.Dq 81.15.Jj Magnetic suppression Plasma immersion ion implantation Secondary electrons
Keyword (fr)
Azote ion Champ magnétique Effet champ magnétique Implantation ion Plasma Traitement surface
Keyword (en)
Nitrogen ions Magnetic fields Magnetic field effects Ion implantation Plasma Surface treatments
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A90 Other topics in materials science

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11C Production techniques / 001D11C06 Surface treatment / 001D11C06F Other surface treatments

Discipline
Metals. Metallurgy Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18654330

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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