Fabrication and characterization of fine pitch on-chip copper interconnects for advanced wafer level packaging by a high aspect ratio through AZ9260 resist electroplating
- Author
- DIXIT, Pradeep1 ; CHEE WEE TAN1 ; LUHUA XU1 ; LIN, Nay1 ; JIANMIN MIAO1 ; PANG, John H. L1 ; BACKUS, Petra2 ; PREISSER, Robert2
[1] Micromachines Center, School of Mechanical & Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore
[2] Atotech, Deutschland GmbH, Berlin, 10553, Germany - Source
Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 5, pp 1078-1086, 9 p ; ref : 21 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Alliage base cuivre Cuivre Dépôt électrolytique Encapsulation Lithographie Microscopie force Microstructure élancée Moule Métal Photorésist Processus fabrication Rapport aspect Revêtement centrifugation Sonde Kelvin Système sur puce
- Keyword (en)
- Copper base alloys Copper Electrodeposition Encapsulation Lithography Force microscopy High aspect ratio microstructure HARM Mold Metal Photoresist Production process Aspect ratio Spin-on coatings Kelvin probe System on a chip
- Keyword (es)
- Cobre Depósito electrolítico Encapsulación Litografía Microscopía fuerza Microestructura esbelta Molde Metal Fotorresistencia Proceso fabricación Relación dimensional Sonda Kelvin Sistema sobre pastilla
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18742203
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/17/5/030 
https://dx.doi.org/10.1088/0960-1317/17/5/030
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