Isochronal annealing behaviour of defects induced by swift oxygen ions in high-resistivity p-type silicon
- Author
- CHAUDHURI, S. K1 ; GOSWAMI, K2 ; GHUGRE, S. S1 ; DAS, D1
[1] UGC-DAE Consortium for Scientific Research, Kolkata Centre, III/LB-8, Bidhannagar, Kolkata-700098, India
[2] Department of Physics, Jadavpur University, 188 Raja S C Mallik Road, Kolkata-700032, India - Source
Journal of physics. Condensed matter (Print). 2007, Vol 19, Num 21, pp 1-9, 9 p ; ref : 24
- CODEN
- JCOMEL
- ISSN
- 0953-8984
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Annihilation positon Distribution impureté Défaut complexe Défaut irradiation Effet rayonnement Elargissement Doppler Etat défaut Faisceau ion Implantation ion Recuit Silicium 6180J 7155C 7870B Si
- Keyword (en)
- Positron annihilation Impurity distribution Complex defect Irradiation defect Radiation effects Doppler broadening Defect states Ion beams Ion implantation Annealing Silicon
- Keyword (es)
- Defecto complejo Defecto irradiación
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A80 Physical radiation effects, radiation damage / 001B60A80J Ion radiation effects
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70A Electron states / 001B70A55 Impurity and defect levels / 001B70A55C Elemental semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H70 Other interactions of matter with particles and radiation / 001B70H70B Positron annihilation
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18787711
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0953-8984/19/21/216206 
https://dx.doi.org/10.1088/0953-8984/19/21/216206
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