Signatures of distinct structures related to rod-like defects in silicon detected by various measurement methods
- Author
- MCHEDLIDZE, T1 ; ARGUIROV, T1 2 ; JIA, G1 ; KINLER, M1 2
[1] IHP/BTU Joint Lab, Konrad-Washmann-Allee 1, 03046 Cottbus, Germany
[2] IHP microelectronics, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany - Conference name
- International Conference on Extended Defects in Semiconductors (EDS 2006) (EDS 2006) (Halle 2006-09-17)
- Source
Physica status solidi. A, Applications and materials science (Print). 2007, Vol 204, Num 7, pp 2229-2237, 9 p ; ref : 24 ref
- ISSN
- 1862-6300
- Scientific domain
- Crystallography; Electronics; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics
- Publisher
- Wiley-VCH, Berlin
- Publication country
- Germany
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- DLTS Dipôle dislocation Défaut linéaire Défaut plan Etat défaut Microscopie électronique transmission Méthode double résonance Photoluminescence Silicium 6172D 7155C 7670 Si
- Keyword (en)
- DLTS Dislocation dipoles Line defects Plane defects Defect states Transmission electron microscopy Double resonance methods Photoluminescence Silicon
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A72 Defects and impurities in crystals; microstructure / 001B60A72D Experimental determination of defects by diffraction and scattering
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70A Electron states / 001B70A55 Impurity and defect levels / 001B70A55C Elemental semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70F Magnetic resonances and relaxations in condensed matter, mössbauer effect / 001B70F70 Magnetic double resonances and cross effects
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18902325
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/pssa.200675447 
https://dx.doi.org/10.1002/pssa.200675447
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