Properties of amorphous carbon nitride prepared by RF reactive sputtering
- Author
- GHARBI, R1 ; KAROUI, M. B1 ; FATHALLAH, M1 2 ; TRESSO, E3
[1] Laboratoire des Semiconducteurs et des Dispositifs Electroniques, Ecole Supérieure des Sciences et Techniques de Tunis, 05 Av. Taha Hussein, 1008, Montfleury, Tunis, Tunisia
[2] College of Sciences, King Saud University, P.O. Box 2455, Riyadh 11451, Saudi Arabia
[3] Politecnico di Torino, 24c.so Duca Degli Abruzzi, 10129 Torino, Italy - Source
Philosophical magazine (2003. Print). 2007, Vol 87, Num 31-33, pp 5079-5088, 10 p ; ref : 22 ref
- ISSN
- 1478-6435
- Scientific domain
- Crystallography; Condensed state physics
- Publisher
- Taylor and Francis, Abingdon
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Carbone nitrure Conductivité obscurité Couche mince Dépendance température Dépôt physique phase vapeur Effet température Mesure conductivité électrique Microstructure Nitrure Propriété optique Propriété électrique Pulvérisation haute fréquence Pulvérisation réactive Semiconducteur Spectre absorption Spectre réflexion Spectrométrie IR Spectrométrie Raman Spectrométrie photothermique Structure électronique 7361L 7820 8115C Couche mince amorphe
- Keyword (en)
- Carbon nitrides Dark conductivity Thin films Temperature dependence Physical vapor deposition Temperature effects Electrical conductivity measurement Microstructure Nitrides Optical properties Electrical properties Radiofrequency sputtering Reactive sputtering Semiconductor materials Absorption spectra Reflection spectrum Infrared spectroscopy Raman spectroscopy Photothermal spectroscopy Electronic structure Amorphous thin film
- Keyword (es)
- Pulverización alta frecuencia Espectro reflexión Capa fina amorfa
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61L Other inorganic semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H20 Optical properties of bulk materials and thin films
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19189834
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1080/14786430701606998 
https://dx.doi.org/10.1080/14786430701606998
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