Summary of ISO/TC 201 Standard: XXX. ISO 18516: 2006 -Surface chemical analysis -Auger electron spectroscopy and X-ray photoelectron spectroscopy -Determination of lateral resolution
- Author
- WOLSTENHOLME, J1
[1] Thermo Fisher Scientific, The Birches Industrial Estate, Imberhorne Lane, East Grinstead, West Sussex, RH19 1UB, United Kingdom - Source
Surface and interface analysis. 2008, Vol 40, Num 5, pp 966-968, 3 p ; ref : 4 ref
- CODEN
- SIANDQ
- ISSN
- 0142-2421
- Scientific domain
- General chemistry, physical chemistry; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics
- Publisher
- Wiley, Chichester
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- AES ISO International Organization for standardisation XPS lateral resolution spatial resolution
- Keyword (fr)
- Analyse chimique Analyse surface Métal transition Méthode mesure Norme ISO Or Résolution latérale Résolution spatiale Spectre photoélectron RX Spectrométrie Auger Structure surface Structure îlot ISO 18516
- Keyword (en)
- Chemical analysis Surface analysis Transition metal Measurement method ISO standard Gold Lateral resolution Spatial resolution X-ray photoelectron spectra Auger electron spectrometry Surface structure Island structure
- Keyword (es)
- Análisis químico Análisis superficie Metal transición Método medida Norma ISO Oro Resolución lateral Resolución espacial Espectrometría Auger Estructura superficie Estructura islote
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00F Metrology, measurements and laboratory procedures / 001B00F20 Metrology / 001B00F20F Units and standards
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70I Electron and ion emission by liquids and solids; impact phenomena / 001B70I60 Photoemission and photoelectron spectra
- Pascal
- 001 Exact sciences and technology / 001C Chemistry / 001C04 Analytical chemistry / 001C04C Spectrometric and optical methods
- Discipline
- Analytical chemistry Metrology Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20316711
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/sia.2771 
https://dx.doi.org/10.1002/sia.2771
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