Amending the uniformity of ion beam current density profile
- Author
- XIAOWEI ZHOU1 ; DEQUAN XU1 ; YING LIU1 ; XIANGDONG XU1 ; SHAOJUN FU1
[1] National Synchrotron Radiation Laboratory, University of Science and Technology of China,P.O. Box 6022, Hefei, China - Conference title
- Holography and diffractive optics III (12-14 November 2007, Beijing, China)
- Conference name
- Holography and diffractive optics (3 ; Beijing 2007)
- Author (monograph)
- Sheng, Yunlong (Editor); Hsu, Dahsiung (Editor); Yu, Chongxiu (Editor)
SPIE, United States (Organiser of meeting)
Zhongguo guang xue xue hui, China (Organiser of meeting)
Nihon Kōgakkai, Ōyō Butsuri Gakkai, Japan (Organiser of meeting)
Zhongguo ke xue ji shu xie hui, China (Organiser of meeting)
Guo jia zi ran ke xue ji jin wei yuan hui, China (Organiser of meeting)
China, Guo jia ke xue ji shu bu, China (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 68322N.1-68322N.6 ; ref : 10 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7007-2
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Densité courant Etude expérimentale Faisceau ion Gravure faisceau ionique 4185
- Keyword (en)
- Current density Experimental study Ion beams Ion beam etching
- Keyword (es)
- Grabado haz iónico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40A Electromagnetism; electron and ion optics / 001B40A85 Beam optics
- Discipline
- Physics : electromagnetism
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20737423
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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