Effect of annealing on the structural, optical and electrical properties of ITO films by RF sputtering under low vacuum level
- Author
- SATHIARAJ, T. S1
[1] Physics Department, University of Botswana, P. Bag 0022, Gaborone, Botswana - Source
Microelectronics journal. 2008, Vol 39, Num 12, pp 1444-1451, 8 p ; ref : 43 ref
- ISSN
- 0959-8324
- Scientific domain
- Electronics
- Publisher
- Elsevier, Kidlington
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- 68.55.J 73.61.Le 78.66.Li 81.15.Cd Annealing Electrical properties Indium tin oxide (ITO) Optical properties Sputtering X-ray diffraction
- Keyword (fr)
- Addition étain Amortissement Caractéristique optique Caractéristique électrique Couche ITO Céramique Diffraction RX Dépendance fréquence Facteur réflexion Facteur transmission Fonction diélectrique Indice réfraction Mesure électrique Microscopie électronique Modèle milieu effectif Oxyde d'indium Pulvérisation haute fréquence Recuit Rugosité Résistivité couche Spectrophotométrie 7361L 7866L ITO
- Keyword (en)
- Tin additions Damping Optical characteristic Electrical characteristic ITO layers Ceramics XRD Frequency dependence Reflectivity Transmittance Dielectric function Refractive index Electrical measurement Electron microscopy Effective medium model Indium oxide Radiofrequency sputtering Annealing Roughness Sheet resistivity Spectrophotometry
- Keyword (es)
- Característica óptica Característica eléctrica Factor transmisión Medida eléctrica Modelo medio efectivo Indio óxido Pulverización alta frecuencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61L Other inorganic semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films / 001B70H66L Other semiconductors
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20951294
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mejo.2008.06.081 
https://dx.doi.org/10.1016/j.mejo.2008.06.081
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