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Achieving λ/20 Resolution by One-Color Initiation and Deactivation of Polymerization

Author
LINJIE LI1 ; GATTASS, Rafael R1 ; GERSHGOREN, Erez1 ; HWANG, Hana2 ; FOURKAS, John T1 3 4 5
[1] Department of Chemistry and Biochemistry, University of Maryland, College Park, MD 20742, United States
[2] Department of Physics, University of Maryland, College Park, MD 20742, United States
[3] Institute for Physical Science and Technology, University of Maryland, College Park, MD 20742, United States
[4] Maryland NanoCenter, University of Maryland, College Park, MD 20742, United States
[5] Center for Nanophysics and Advanced Materials, University of Maryland, College Park, MD 20742, United States
Source

Science (Washington, D.C.). 2009, Vol 324, Num 5929, pp 910-913, 4 p

CODEN
SCIEAS
ISSN
0036-8075
Scientific domain
Multidisciplinary
Publisher
American Association for the Advancement of Science, Washington, DC
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Absorption multiphotonique Photolithographie Polymère Polymérisation photochimique Structure 3 dimensions 4282C Limite diffraction
Keyword (en)
Multiphoton absorption Photolithography Polymer Photopolymerization Three dimensional structure Diffraction limit
Keyword (es)
Absorción multifotónica Fotolitografía Polímero Polimerización fotoquímica Estructura 3 dimensiones
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
21500847

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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