Pattern transfer on a vertical cavity sidewall using SU8
- Author
- VERHAAR, T. M1 ; WEI, J1 ; SARRO, P. M1
[1] DIMES (Delft Institute of Microsystems and Nanoelectronics), Electronic Components, Technology and Materials Laboratory, Delft University of Technology, Feldmannweg 17, 2628 CT Delft, Netherlands - Conference name
- MicroMechanics Europe Worshop (MME) (MME) (19 ; Aachen 2008-09-28)
- Source
Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 7 ; 074018.1-074018.6 ; ref : 11 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Cavité Compatibilité Dispositif microélectromécanique Formation motif Microstructure élancée Métal Photorésist Procédé dépôt Procédé revêtement Remplissage
- Keyword (en)
- Cavity Compatibility Microelectromechanical device Patterning High aspect ratio microstructure HARM Metal Photoresist Deposition process Coating process Filling
- Keyword (es)
- Cavidad Compatibilidad Dispositivo microelectromecánico Formacíon motivo Microestructura esbelta Metal Fotorresistencia Procedimiento revestimiento Procedimiento revestimiento Relleno
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21738115
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/19/7/074018 
https://dx.doi.org/10.1088/0960-1317/19/7/074018
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