Determination of the collection efficiency for combined magnetic-electrostatic SEM objective lenses
- Author
- KNELL, G1 ; PLIES, E1
[1] Institut für Angewandte Physik, Universität Tübingen, Germany - Source
Optik (Stuttgart). 1998, Vol 108, Num 1, pp 37-42 ; ref : 12 ref
- Publisher
- Elsevier, Jena
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Keyword (fr)
- Conception Diffusion électron Détection électron Etude théorique Lentille magnétique Lentille électrostatique Microscope électronique Rétrodiffusion SEM
- Keyword (en)
- Design Electron scattering Electron detection Theoretical study Magnetic lenses Electrostatic lenses Electron microscopes Backscattering SEM
- Keyword (es)
- Difusión electrón
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G78 Electron, positron and ion microscopes, electron diffractometers and related techniques
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40A Electromagnetism; electron and ion optics / 001B40A85 Beam optics / 001B40A85N Electrostatic lenses. Septa
- Discipline
- Metrology Physics : electromagnetism
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2227704
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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