The Prandtl micro flow sensor (PMFS) : a novel silicon diaphragm capacitive sensor for flow-velocity measurement
- Author
- BERBERIG, O1 ; NOTTMEYER, K1 ; MIZUNO, J2 ; KANAI, Y2 ; KOBAYASHI, T2
[1] ZEXEL Corporation, European R&D Office, Ihmepassage 4, 30449 Hannover, Germany
[2] ZEXEL Corporation, R&D Center, 3-13-26 Yakyu-cho, Higashimatsuyama-shi, Saitama 355, Japan - Conference title
- TRANSDUCERS '97: International Conference on Solid-State Sensors and Actuators
- Conference name
- TRANSDUCERS '97: International Conference on Solid-State Sensors and Actuators (9 ; Chicago, IL 1997-06-16)
- Author (monograph)
- MIDDELHOEK, S (Editor); CAMMANN, K (Editor)
- Source
Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 93-98 ; ref : 4 ref
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Capteur Déflexion Etude expérimentale Fabrication Mesure vitesse écoulement Mesure Pression dynamique Pression statique
- Keyword (en)
- Sensors Deflection Experimental study Fabrication Flow velocity measurement Metering Dynamic pressure Static pressure
- Keyword (es)
- Medición velocidad flugo Presión dinámica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00F Metrology, measurements and laboratory procedures / 001B00F30 Measurements common to several branches of physics and astronomy / 001B00F30G Velocity, acceleration and rotation
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2254352
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0924-4247(97)01733-0 
https://dx.doi.org/10.1016/S0924-4247(97)01733-0
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