Nanoscale Three-Dimensional Patterning of Molecular Resists by Scanning Probes
- Author
- PIRES, David1 ; HEDRICK, James L2 ; DE SILVA, Anuja3 ; FROMMER, Jane2 ; GOTSMANN, Bernd1 ; WOLF, Heiko1 ; DESPONT, Michel1 ; DUERIG, Urs1 ; KNOLL, Armin W1
[1] IBM Research-Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
[2] IBM Research-Almaden, 650 Harry Road, San Jose, CA 95120, United States
[3] IBM Research-Watson, T. J. Watson Research Center, Yorktown Heights, NY 10598, United States - Source
Science (Washington, D.C.). 2010, Vol 328, Num 5979, pp 732-735, 4 p ; ref : 33 ref
- CODEN
- SCIEAS
- ISSN
- 0036-8075
- Scientific domain
- Multidisciplinary
- Publisher
- American Association for the Advancement of Science, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Fabrication microélectronique Formation motif Nanolithographie Résist Structure 3 dimensions Lithographie en champ proche
- Keyword (en)
- Microelectronic fabrication Patterning Nanolithography Resist Three dimensional structure Scanning probe lithography
- Keyword (es)
- Fabricación microeléctrica Formacíon motivo Resistencia Estructura 3 dimensiones
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22744306
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1126/science.1187851 
https://dx.doi.org/10.1126/science.1187851
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