Design and performance of an excimer-laser based optical system for high precision microstructuring
- Author
- GERLACH, K.-H1 ; JERSCH, J1 ; DICKMANN, K1 ; HILDENHAGEN, L. J1
[1] Laserzentrum Fachhochschule Münster, Fachbereich Physikalische Technik, Stegerwaldstrasse 39, 48465 Steinfurt, Germany - Source
Optics and laser technology. 1997, Vol 29, Num 8, pp 439-447 ; ref : 40 ref
- CODEN
- OLTCAS
- ISSN
- 0030-3992
- Scientific domain
- Electronics; Optics; Telecommunications
- Publisher
- Elsevier Science, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Application laser Etude expérimentale Laser excimère Laser gaz Microusinage Photolithographie Rayonnement UV Système optique
- Keyword (en)
- Laser beam applications Experimental study Excimer lasers Gas lasers Micromachining Photolithography Ultraviolet radiation Optical systems
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B60 Laser optical systems: design and operation / 001B40B60B Design of specific laser systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B62 Biological and medical applications
- Discipline
- Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2311813
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0030-3992(97)00049-2 
https://dx.doi.org/10.1016/S0030-3992(97)00049-2
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