Design and fabrication of a large-stroke MEMS deformable mirror for wavefront control
- Author
- LIN, Po-Yu1 ; HSIEH, Hsin-Ta1 ; JOHN SU, Guo-Dung1
[1] Graduate Institute of Photonics and Optoelectronics, National Taiwan University, No. 1, Section 4, Roosevelt Road, Taipei 106, Taiwan, Province of China - Source
Journal of optics (Print). 2011, Vol 13, Num 5 ; 055404.1-055404.8 ; ref : 18 ref
- Publisher
- IOP, Philadelphia, Pa
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- MEMS adaptive optics deformable mirror electrostatic force polyimide wavefront control
- Keyword (fr)
- Dispositif microélectromécanique Evaluation performance Force électrostatique Front onde Imide polymère Miroir déformable Optique adaptative Optique non linéaire Polymère Système optique Vision 4279B 8585
- Keyword (en)
- Microelectromechanical device Performance evaluation Electrostatic force Wavefront Polyimide Deformable mirror Adaptive optics Non linear optics Polymer Optical system Vision
- Keyword (es)
- Dispositivo microelectromecánico Evaluación prestación Fuerza electrostática Frente onda Imida polímero Espejo deformable Optica adaptativa Optica no lineal Polímero Sistema óptico Visión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79B Lenses, prisms, and mirrors
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 24234609
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/2040-8978/13/5/055404 
https://dx.doi.org/10.1088/2040-8978/13/5/055404
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