Micromachined array-type Mirau interferometer for parallel inspection of MEMS
- Author
- ALBERO, J1 ; BARGIEL, S1 ; PASSILLY, N1 ; DANNBERG, P2 ; STUMPF, M2 ; ZEITNER, U. D2 ; ROUSSELOT, C1 ; GASTINGER, K3 ; GORECKI, C1
[1] Departement MN2S, FEMTO-ST (UMR CNRS 6174), 16 Route de Gray, 25030 Besançon, France
[2] Fraunhofer IOF, A-Einstein-Str. 7, 07745-Jena, Germany
[3] SINTEF IKT Optical Measurement Systems and Data Analysis, 7465 Trondheim, Norway - Source
Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 6 ; 065005.1-065005.10 ; ref : 22 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Aberration sphérique Capteur mesure Contrôle qualité Dispositif microélectromécanique Interférométrie optique Lumière blanche Mesure Microlentille Micromiroir Microoptique Microusinage Montage Optique intégrée Processus fabrication Tomographie en cohérence optique Verre Interféromètre Mirau Réseau optique
- Keyword (en)
- Spherical aberration Measurement sensor Quality control Microelectromechanical device Light interferometry White light Metering Microlenses Micromirrors Micro-optics Micromachining Assembling Integrated optics Production process Optical coherence tomography Glass Mirau interferometer Optical arrays
- Keyword (es)
- Aberración esférica Captador medida Dispositivo microelectromecánico Luz blanca Proceso fabricación Tomógrafo óptico de coherencia Interferómetro Mirau Rejilla óptica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03B Testing, measurement, noise and reliability
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 24298048
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/21/6/065005 
https://dx.doi.org/10.1088/0960-1317/21/6/065005
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