The comparison of NGLs from a tool vendor's view
- Author
- SUZUKI, Akiyoshi1
[1] Optical Products Operations, Canon Inc. 23-2, Kiyohara-Kogyodanchi, Utsunomiya-shi, Tochigi 321-3292, Japan - Conference title
- Alternative lithographic technologies III (1-3 March 2011, San Jose, California, United States)
- Conference name
- Alternative lithographic technologies (03 ; San Jose CA 2011)
- Author (monograph)
- Herr, Daniel J. C (Editor)
SPIE, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7970 ; 797005.1-797005.12 ; ref : 11 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-8529-8
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Contrôle vibration Distorsion non linéaire Distorsion signal Dépendance du temps Etude comparative Fabrication microélectronique Front onde Gestion température packaging électronique Illumination hors axe Lithographie UV Masque Nanolithographie Optimisation Pastille électronique Photolithographie Rayonnement UV extrême Revêtement protecteur Résist Système refroidissement Temps exposition
- Keyword (en)
- Vibration control Non linear distortion Signal distortion Time dependence Comparative study Microelectronic fabrication Wavefront Thermal management (packaging) Off axis illumination UV lithography Mask Nanolithography Optimization Wafer Photolithography Vacuum ultraviolet radiation Protective coatings Resist Cooling system Exposure time
- Keyword (es)
- Control vibración Distorsión no lineal Distorsión señal Dependencia del tiempo Estudio comparativo Fabricación microeléctrica Frente onda Iluminación fuera de eje Litografía UV Máscara Optimización Pastilla electrónica Fotolitografía Radiación ultravioleta extrema Revestimiento protector Resistencia Sistema enfriamiento Tiempo exposición
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 24470077
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.881274 
https://dx.doi.org/10.1117/12.881274
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