A hermetic glass-silicon micropackage with high-density on-chip feedthroughs for sensors and actuators
- Author
- ZIAIE, B1 ; VON ARX, J. A1 ; DOKMECI, M. R1 ; NAJAFI, K1
[1] Center for Integrated Sensors and Circuits, Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109-2122, United States - Source
Journal of microelectromechanical systems. 1996, Vol 5, Num 3, pp 166-179 ; ref : 34 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur Capteur mesure Durée vie Encapsulation Fiabilité Microstructure Processus fabrication Scellement hermétique Simulation Temps moyen avant défaillance Verre Attachement Silicium polycristallin
- Keyword (en)
- Actuator Measurement sensor Lifetime Encapsulation Reliability Microstructure Production process Hermetic sealing Simulation Mean time to failure Glass Polysilicon
- Keyword (es)
- Accionador Captador medida Tiempo vida Encapsulación Fiabilidad Microestructura Proceso fabricación Sellado hermético Simulación Tiempo medio antes fenecimiento Vidrio
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2472085
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/84.536623 
https://dx.doi.org/10.1109/84.536623
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