Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films
- Author
- TAVAKKOLI, A1 2 ; GOTRIK, K. W3 ; HANNON, A. F3 ; ALEXANDER-KATZ, A3 ; ROSS, C. A3 ; BERGGREN, K. K1
[1] Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA 02139, United States
[2] NUS Graduate School for Integrative Sciences & Engineering (NGS), Singapore 117456, Singapore
[3] Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, United States - Source
Science (Washington, D.C.). 2012, Vol 336, Num 6086, pp 1294-1298, 5 p ; ref : 34 ref
- CODEN
- SCIEAS
- ISSN
- 0036-8075
- Scientific domain
- Multidisciplinary
- Publisher
- American Association for the Advancement of Science, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Bicouche Brosse polymère Copolymère biséquencé Couche ultramince Dépôt centrifugation Etude expérimentale Formation motif Forme cylindrique Gravure ionique réactive Lithographie faisceau électron Modélisation Méthode SCF Siloxane(diméthyl) copolymère Structure 3 dimensions Styrène copolymère Styrène polymère Surface hétérogène Orientation microdomaine Recuit sous vapeur solvant
- Keyword (en)
- Bilayers Polymer brush Diblock copolymer Ultrathin films Spin-on coating Experimental study Patterning Cylindrical shape Reactive ion etching Electron beam lithography Modeling SCF method Dimethylsiloxane copolymer Three dimensional structure Styrene copolymer Styrene polymer Heterogeneous surface
- Keyword (es)
- Cepillo polímero Copolímero bisecuencia Estudio experimental Formacíon motivo Forma cilíndrica Grabado iónico reactivo Litografía haz electrón Modelización Método SCF Siloxano(dimetil) copolímero Estructura 3 dimensiones Estireno copolímero Estireno polímero Superficie heterogénea
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers / 001D09D Organic polymers / 001D09D04 Properties and characterization / 001D09D04K Structure, morphology and analysis
- Discipline
- Physical chemistry of polymers
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 25982626
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1126/science.1218437 
https://dx.doi.org/10.1126/science.1218437
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