The monolithic integration system of bulk-Si sensors and actuators based on the Au―Au bonding technology
- Author
- CHUNHUA CAI1 ; MING QIN1
[1] Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China - Source
Microsystem technologies. 2013, Vol 19, Num 2, pp 195-201, 7 p ; ref : 3/4 p
- ISSN
- 0946-7076
- Scientific domain
- Electronics; Mechanical engineering; Metrology and instrumentation
- Publisher
- Springer, Heidelberg
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur Capteur pression Circuit intégré monolithique Dispositif microélectromécanique Dépôt pulvérisation Liaison matériau Métal transition Or Sensibilité Silicium Technologie MOS complémentaire Actionneur électrothermique Si
- Keyword (en)
- Actuators Pressure sensors Monolithic integrated circuits Microelectromechanical device Sputter deposition Bonding Transition elements Gold Sensitivity Silicon Complementary MOS technology Electrothermal actuator
- Keyword (es)
- Dispositivo microelectromecánico Tecnología MOS complementario
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07M Transducers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27595529
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s00542-012-1583-0 
https://dx.doi.org/10.1007/s00542-012-1583-0
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