Atomic layer deposition of strontium titanate films from Sr(iPr3Cp)2, Ti[N(CH3)2]4 and H2O
- Author
- RENTROP, S1 ; MOEBUS, T1 ; ABENDROTH, B1 ; STROHMEYER, R1 ; SCHMID, A2 ; WELING, T3 ; HANZIG, J1 ; HANZIG, F1 ; STÖCKER, H1 ; MEYER, D. C1
[1] Institut für Experimentelle Physik, TU Bergakademie Freiberg, Leipziger Str. 23, 09596 Freiberg, Germany
[2] Institut für Angewandte Physik TU Bergakademie Freiberg, Leipziger Str. 23, 09596 Freiberg, Germany
[3] Institut für Physikalische Chemie, TU Bergakademie Freiberg, Leipziger Str. 29, 09596 Freiberg, Germany - Source
Thin solid films. 2014, Vol 550, pp 53-58, 6 p ; ref : 58 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Atomic layer deposition Sr(iPr3Cp)2 Strontium titanate TDMAT
- Keyword (fr)
- Carbone Commutation Couche mince Croissance cristalline en phase vapeur Diffraction RX Fluorescence RX Incidence rasante Microstructure Mémoire accès direct Méthode couche atomique Propriété optique Propriété électrique Propriété électronique Spectre photoélectron RX Stoechiométrie Titanate Titane 6855J 7320 7866 8115K
- Keyword (en)
- Carbon Switching Thin films Crystal growth from vapors XRD X ray fluorescence Grazing incidence Microstructure Random-access storage Atomic layer method Optical properties Electrical properties Electronic properties X-ray photoelectron spectra Stoichiometry Titanates Titanium
- Keyword (es)
- Fluorescencia RX Incidencia rasante Método capa atómica Propiedad electrónica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C20 Surface and interface electron states
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15K Vapor phase epitaxy; growth from vapor phase
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 28251187
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2013.10.043 
https://dx.doi.org/10.1016/j.tsf.2013.10.043
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