Optical characterization of nanocrystalline boron nitride thin films grown by atomic layer deposition
- Author
- SNURE, Michael1 ; QING PADUANO1 ; HAMILTON, Merle1 ; SHOAF, Jodie2 ; MANN, J. Matthew1
[1] Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH, United States
[2] Wyle Laboratories, Inc., Wright-Patterson AFB, OH, United States - Source
Thin solid films. 2014, Vol 571, pp 51-55, 5 p ; 1 ; ref : 32 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Atomic layer deposition Boron nitride Fourier-transform infrared spectroscopy Raman spectroscopy Thin films
- Keyword (fr)
- Ammoniac Bande interdite Couche mince Cristallite Croissance cristalline en phase vapeur Dépendance température Déplacement raie Déplacement vers le rouge Epaisseur couche Méthode couche atomique Nanocristal Nanostructure Nitrure de bore Propriété optique Propriété électronique Précurseur Relation ordre Spectre absorption Spectrométrie Raman Spectrométrie transformée Fourier Structure électronique Transformation ordre désordre 6855J 7866 8107 8115K BN NH3 Substrat saphir Substrat silicium
- Keyword (en)
- Ammonia Energy gap Thin films Crystallites Crystal growth from vapors Temperature dependence Spectral line shift Red shift Layer thickness Atomic layer method Nanocrystal Nanostructures Boron nitride Optical properties Electronic properties Precursor Ordering Absorption spectra Raman spectroscopy Fourier transform spectroscopy Electronic structure Order-disorder transformations
- Keyword (es)
- Espesor capa Método capa atómica Nanocristal Boro nitruro Propiedad electrónica Relación orden
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A07 Nanoscale materials and structures: fabrication and characterization / 001B80A07Z Other topics in nanoscale materials and structures
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15K Vapor phase epitaxy; growth from vapor phase
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 29053503
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2014.09.065 
https://dx.doi.org/10.1016/j.tsf.2014.09.065
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