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Morphological, chemical and electrical characterization of Pt-SnO2 thin film grown on rough and mechanically polished Al2O3 substrates

Author
CRICENTI, A1 ; GENEROSI, R1 ; SCARSELLI, M. A1 ; PERFETTI, P1 ; SICILIANO, P2 ; SERRA, A2 ; TEPORE, A3 ; COLUZZA, C4 ; ALMEIDA, J4 ; MARGARITONDO, G5
[1] Istituto di Struttura della Materia del CNR, Via E. Fermi 38, 00044 Frascati, Italy
[2] Istituto per lo Studio di Nuovi Materiali per l'Elettronica, Via Arnesano, 73100 Lecce, Italy
[3] Dipartimento di Scienza dei Materiali, Universitá di Lecce, Via Arnesano, 73110 Lecce, Italy
[4] INFM-Dip. Fisica, Universitá di Roma 'La Sapienza', Ple A. Moro 2, 00186 Roma, Italy
[5] Institute de Physique Appliquée, Ecole Polytecnique Federale, 1015 Lausanne, Switzerland
Conference title
Applied Magnetism and Magnetic Materials. Workshop
Conference name
Applied Magnetism and Magnetic Materials. Workshop
Source

Journal of physics. D, Applied physics (Print). 1996, Vol 29, Num 9, pp 2235-2239 ; ref : 19 ref

CODEN
JPAPBE
ISSN
0022-3727
Scientific domain
Condensed state physics; Physics; Plasma physics
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Conference Paper
Language
English
Keyword (fr)
Agrégat métallique Capteur Caractérisation Composition chimique Composé binaire Conductivité électrique Couche mince Croissance cristalline en phase vapeur Etain oxyde Etude expérimentale Matériau composite Platine Pulvérisation réactive Rugosité Substrat Surface Topographie O Sn Pt SnO2 Composé minéral Métal transition
Keyword (en)
Metal cluster Sensors Characterization Chemical composition Binary compounds Electric conductivity Thin films Crystal growth from vapors Tin oxides Experimental study Composite materials Platinum Reactive sputtering Roughness Substrates Surfaces Topography Inorganic compounds Transition elements
Keyword (es)
Agregado metálico Caracterización
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C50 Electronic transport phenomena in thin films and low-dimensional structures / 001B70C50D Low-field transport and mobility; piezoresistance

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering

Pacs
6835 Solid surfaces and solid-solid interfaces

Pacs
7350D Low-field transport and mobility; piezoresistance

Pacs
8115C Deposition by sputtering

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3225797

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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