Paramagnetic defect centers in BESOI and SIMOX buried oxides
- Author
- WARREN, W. L1 ; SHANEYFELT, M. R1 ; SCHWANK, J. R1 ; FLEETWOOD, D. M1 ; WINOKUR, P. S1 ; DEVINE, R. A. B; MASZARA, W.P; MCKITTERICK, J.B
[1] Sandia National Laboratories, Albuquerque NM 87185-5800, United States - Conference title
- NSREC'93 : IEEE international nuclear and space radiation effects conference
- Conference name
- NSREC'93 : IEEE international nuclear and space radiation effects conference (30 ; Snowbird UT 1993-07-19)
- Author (monograph)
- BUEHLER, MARTIN (Editor)
IEEE. Nuclear and Plasma Sciences Society. Radiation Effects Communittee, United States (Funder/Sponsor)
California inst. technology, jet propulsion lab., Pasadena CA 91109, United States - Source
IEEE transactions on nuclear science. 1993, Vol 40, Num 6, pp 1755-1764 ; ref : 33 ref
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Caractéristique capacité tension Centre paramagnétique Défaut Fabrication microélectronique Méthode analyse Méthode mesure Résonance paramagnétique électronique Silicium Oxyde Technologie silicium sur isolant Technologie SIMOX
- Keyword (en)
- Voltage capacity curve Paramagnetic center Defect Microelectronic fabrication Analysis method Measurement method Electron paramagnetic resonance Silicon Oxides Silicon on insulator technology SIMOX technology
- Keyword (es)
- Característica capacidad tensión Centro paramagnético Defecto Fabricación microeléctrica Método análisis Método medida Resonancia paramagnética electrónica Silicio Óxido Tecnología silicio sobre aislante
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3320645
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Access to the document
Install on your browser
DOI
10.1109/23.273482 
https://dx.doi.org/10.1109/23.273482
"O:13:\"PanistOpenUrl\":36:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000idc\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:17:\"10.1109\/23.273482\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:9:\"\u0000*\u0000jtitle\";s:36:\"IEEE transactions on nuclear science\";s:9:\"\u0000*\u0000stitle\";s:21:\"IEEE trans. nucl. sci\";s:7:\"\u0000*\u0000date\";s:4:\"1993\";s:9:\"\u0000*\u0000volume\";s:2:\"40\";s:8:\"\u0000*\u0000issue\";s:1:\"6\";s:8:\"\u0000*\u0000spage\";s:4:\"1755\";s:8:\"\u0000*\u0000epage\";s:4:\"1764\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0018-9499\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"WARREN\";s:10:\"\u0000*\u0000aufirst\";s:4:\"W. L\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:7:{i:0;s:16:\"SHANEYFELT, M. R\";i:1;s:13:\"SCHWANK, J. R\";i:2;s:15:\"FLEETWOOD, D. M\";i:3;s:13:\"WINOKUR, P. S\";i:4;s:15:\"DEVINE, R. A. B\";i:5;s:12:\"MASZARA, W.P\";i:6;s:16:\"MCKITTERICK, J.B\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"IETNAE\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:76:\"NSREC'93 : IEEE international nuclear and space radiation effects conference\";s:8:\"\u0000*\u0000title\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:8:\"\u0000*\u0000place\";s:12:\"New York, NY\";s:6:\"\u0000*\u0000pub\";s:49:\"Institute of Electrical and Electronics Engineers\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Panist access
"O:12:\"IstexOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:17:\"10.1109\/23.273482\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:9:\"\u0000*\u0000jtitle\";s:36:\"IEEE transactions on nuclear science\";s:9:\"\u0000*\u0000stitle\";s:21:\"IEEE trans. nucl. sci\";s:7:\"\u0000*\u0000date\";s:4:\"1993\";s:9:\"\u0000*\u0000volume\";s:2:\"40\";s:8:\"\u0000*\u0000issue\";s:1:\"6\";s:8:\"\u0000*\u0000spage\";s:4:\"1755\";s:8:\"\u0000*\u0000epage\";s:4:\"1764\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0018-9499\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"WARREN\";s:10:\"\u0000*\u0000aufirst\";s:4:\"W. L\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:7:{i:0;s:16:\"SHANEYFELT, M. R\";i:1;s:13:\"SCHWANK, J. R\";i:2;s:15:\"FLEETWOOD, D. M\";i:3;s:13:\"WINOKUR, P. S\";i:4;s:15:\"DEVINE, R. A. B\";i:5;s:12:\"MASZARA, W.P\";i:6;s:16:\"MCKITTERICK, J.B\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"IETNAE\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:76:\"NSREC'93 : IEEE international nuclear and space radiation effects conference\";s:8:\"\u0000*\u0000title\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:8:\"\u0000*\u0000place\";s:12:\"New York, NY\";s:6:\"\u0000*\u0000pub\";s:49:\"Institute of Electrical and Electronics Engineers\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Istex access
"O:16:\"UnpaywallOpenUrl\":35:{s:8:\"\u0000*\u0000email\";s:27:\"assistance-portail@inist.fr\";s:6:\"\u0000*\u0000fmt\";N;s:6:\"\u0000*\u0000doi\";s:17:\"10.1109\/23.273482\";s:6:\"\u0000*\u0000pii\";N;s:7:\"\u0000*\u0000pmid\";N;s:9:\"\u0000*\u0000atitle\";N;s:9:\"\u0000*\u0000jtitle\";N;s:9:\"\u0000*\u0000stitle\";N;s:7:\"\u0000*\u0000date\";N;s:9:\"\u0000*\u0000volume\";N;s:8:\"\u0000*\u0000issue\";N;s:8:\"\u0000*\u0000spage\";N;s:8:\"\u0000*\u0000epage\";N;s:8:\"\u0000*\u0000pages\";N;s:7:\"\u0000*\u0000issn\";N;s:8:\"\u0000*\u0000eissn\";N;s:9:\"\u0000*\u0000aulast\";N;s:10:\"\u0000*\u0000aufirst\";N;s:9:\"\u0000*\u0000auinit\";N;s:10:\"\u0000*\u0000auinitm\";N;s:5:\"\u0000*\u0000au\";N;s:9:\"\u0000*\u0000aucorp\";N;s:7:\"\u0000*\u0000isbn\";N;s:8:\"\u0000*\u0000coden\";N;s:8:\"\u0000*\u0000genre\";N;s:7:\"\u0000*\u0000part\";N;s:9:\"\u0000*\u0000btitle\";N;s:8:\"\u0000*\u0000title\";N;s:8:\"\u0000*\u0000place\";N;s:6:\"\u0000*\u0000pub\";N;s:10:\"\u0000*\u0000edition\";N;s:9:\"\u0000*\u0000tpages\";N;s:9:\"\u0000*\u0000series\";N;s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";N;}"
Unpaywall access
"O:16:\"EuropePMCOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:17:\"10.1109\/23.273482\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:9:\"\u0000*\u0000jtitle\";s:36:\"IEEE transactions on nuclear science\";s:9:\"\u0000*\u0000stitle\";s:21:\"IEEE trans. nucl. sci\";s:7:\"\u0000*\u0000date\";s:4:\"1993\";s:9:\"\u0000*\u0000volume\";s:2:\"40\";s:8:\"\u0000*\u0000issue\";s:1:\"6\";s:8:\"\u0000*\u0000spage\";s:4:\"1755\";s:8:\"\u0000*\u0000epage\";s:4:\"1764\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0018-9499\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"WARREN\";s:10:\"\u0000*\u0000aufirst\";s:4:\"W. L\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:7:{i:0;s:16:\"SHANEYFELT, M. R\";i:1;s:13:\"SCHWANK, J. R\";i:2;s:15:\"FLEETWOOD, D. M\";i:3;s:13:\"WINOKUR, P. S\";i:4;s:15:\"DEVINE, R. A. B\";i:5;s:12:\"MASZARA, W.P\";i:6;s:16:\"MCKITTERICK, J.B\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"IETNAE\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:76:\"NSREC'93 : IEEE international nuclear and space radiation effects conference\";s:8:\"\u0000*\u0000title\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:8:\"\u0000*\u0000place\";s:12:\"New York, NY\";s:6:\"\u0000*\u0000pub\";s:49:\"Institute of Electrical and Electronics Engineers\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Europe PubMed Central access
"O:11:\"BaseOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:17:\"10.1109\/23.273482\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:9:\"\u0000*\u0000jtitle\";s:36:\"IEEE transactions on nuclear science\";s:9:\"\u0000*\u0000stitle\";s:21:\"IEEE trans. nucl. sci\";s:7:\"\u0000*\u0000date\";s:4:\"1993\";s:9:\"\u0000*\u0000volume\";s:2:\"40\";s:8:\"\u0000*\u0000issue\";s:1:\"6\";s:8:\"\u0000*\u0000spage\";s:4:\"1755\";s:8:\"\u0000*\u0000epage\";s:4:\"1764\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0018-9499\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"WARREN\";s:10:\"\u0000*\u0000aufirst\";s:4:\"W. L\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:7:{i:0;s:16:\"SHANEYFELT, M. R\";i:1;s:13:\"SCHWANK, J. R\";i:2;s:15:\"FLEETWOOD, D. M\";i:3;s:13:\"WINOKUR, P. S\";i:4;s:15:\"DEVINE, R. A. B\";i:5;s:12:\"MASZARA, W.P\";i:6;s:16:\"MCKITTERICK, J.B\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"IETNAE\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:76:\"NSREC'93 : IEEE international nuclear and space radiation effects conference\";s:8:\"\u0000*\u0000title\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:8:\"\u0000*\u0000place\";s:12:\"New York, NY\";s:6:\"\u0000*\u0000pub\";s:49:\"Institute of Electrical and Electronics Engineers\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Base Search access
"O:12:\"ArXivOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:17:\"10.1109\/23.273482\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:9:\"\u0000*\u0000jtitle\";s:36:\"IEEE transactions on nuclear science\";s:9:\"\u0000*\u0000stitle\";s:21:\"IEEE trans. nucl. sci\";s:7:\"\u0000*\u0000date\";s:4:\"1993\";s:9:\"\u0000*\u0000volume\";s:2:\"40\";s:8:\"\u0000*\u0000issue\";s:1:\"6\";s:8:\"\u0000*\u0000spage\";s:4:\"1755\";s:8:\"\u0000*\u0000epage\";s:4:\"1764\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0018-9499\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:6:\"WARREN\";s:10:\"\u0000*\u0000aufirst\";s:4:\"W. L\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:7:{i:0;s:16:\"SHANEYFELT, M. R\";i:1;s:13:\"SCHWANK, J. R\";i:2;s:15:\"FLEETWOOD, D. M\";i:3;s:13:\"WINOKUR, P. S\";i:4;s:15:\"DEVINE, R. A. B\";i:5;s:12:\"MASZARA, W.P\";i:6;s:16:\"MCKITTERICK, J.B\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"IETNAE\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:76:\"NSREC'93 : IEEE international nuclear and space radiation effects conference\";s:8:\"\u0000*\u0000title\";s:60:\"Paramagnetic defect centers in BESOI and SIMOX buried oxides\";s:8:\"\u0000*\u0000place\";s:12:\"New York, NY\";s:6:\"\u0000*\u0000pub\";s:49:\"Institute of Electrical and Electronics Engineers\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
arXiv access
